Performance of Chemical Vapor Deposited ZnO thin film as thermal interface material on optical properties of LED

  • Nur Jassriatul Aida bt Jamaludin Universiti Sains Malaysia, Penang
  • S. Shanmugan Universiti Sains Malaysia, Penang
  • D. Mutharasu Universiti Sains Malaysia, Penang


Chemical Vapor Deposition (CVD) was used for the synthesis of ZnO thin film on Al substrates at various flow rates of O2 gas. ZnO thin film coated substrates were tested as thermal substrates on influencing the optical properties of high power LED at various operating currents. Spectrometer analysis showed that ZnO thin film prepared at 10 sccm O2 flow rate showed better performance by reducing the Color Correlated Temperature (CCT) at driving currents. CCT values were maintained with respect to driving currents by ZnO thin film interface at all driving currents than air interface (bare Al substrate). On luminous flux analysis, 5 sccm samples showed good performance on increasing the light of the give LED at all driving currents than bare Al boundary condition. The observed results were evidenced with help of particle size distribution analysis on all film surface using Nanoscope software. Overall, ZnO thin film deposited at low O2 flow rate would be an alternative to solid thin film interface material in electronic packaging applications.


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Author Biographies

Nur Jassriatul Aida bt Jamaludin, Universiti Sains Malaysia, Penang
Student, School of Physics
S. Shanmugan, Universiti Sains Malaysia, Penang
Senior Lecturer, School of Physics
D. Mutharasu, Universiti Sains Malaysia, Penang
Associate Professor, School of Physics


[1] Chang, M.H., Das, D., Varde, P.V. and Pecht, M., Light emitting diodes reliability review. Microelectron. Reliab., vol.52, pp. 762-782 2012.
[2] Routledge G. Lighting the way to a low-energy future. IEE Rev. vol 48, pp. 21-25, September 2002.
[3] Nakayama W. Thermal management of electronic equipment- A review of technology and research topics. Appl. Mech. Rev., vol. 39, pp. 1847-1868, December 1986.
[4] Fontoynont M. Perceived performance of daylighting systems: lighting efficacy and agreeableness. Sol. Energy. vol. 31, pp. 83-94. August 2002.
[5] Due J, Robinson AJ. Reliability of thermal interface materialsA review. Appl. Therm. Eng. Vol. 50, pp. 455-463, 10 Jan 2013.
[6] Gwinn, J.P. and Webb, R.L., Performance and testing of thermal interface materials. Microelectron. J, vol. 34, pp.215-222, 2003.
[7] Weixel, M., Hewlett-Packard Company, Composite thermal interface pad. U.S. Patent 6,037,659, 2000.
[8] Li, Y. and Wong, C.P., Recent advances of conductive adhesives as a lead-free alternative in electronic packaging: materials, processing, reliability and applications. Mater. Sci. Eng: R: Reports, vol. 51, pp.1-35, 2006.
[9] Park, Jong-Jin, and Minoru Taya. "Design of thermal interface material with high thermal conductivity and measurement apparatus." J. Electron. Packag. 128, 46-52, 2006.
[10] Shanmugan S, Mutharasu D. “Thermal and optical performance of LED using Zn thin film as thermal interface material in electronic packaging application” International Journal of Engineering Trends and Technology (IJETT), Vol. 39 no. 1, 2016.
[11] Ong, Z.Y., Shanmugan, S. and Mutharasu, D., “Thermal performance of high power LED on boron doped aluminium nitride thin film coated copper substrates.” J. Sci. Res. Rep., vol. 5, pp.109-119, 2015
[12] Shinde SS, Shinde PS, Bhosale CH, Rajpure KY. Optoelectronic properties of sprayed transparent and conducting indium doped zinc oxide thin films. J. Phys. D: Appl. Phys. Vol. 41, pp. 105109, May 2008.
[13] Jagadish C, Pearton SJ, editors. Zinc oxide bulk, thin films and nanostructures: processing, properties, and applications. Elsevier; 10 October 2011.
[14] Shanmugan S, Yin OZ, Anithambigai P, Mutharasu D. Analysis of ZnO Thin Film as Thermal Interface Material for High Power Light Emitting Diode Application. J. Electron. Packag. Vol. 138, pp. 011001, 1 Mar 2016.
[15] Mutharasu, D., Shanmugan, S., Anithambigai, P. and Yin, O.Z., Performance testing of 3-W LED mounted on ZnO thin film coated Al as heat sink using dual interface method. IEEE Transactions on Electron Devices, vol. 60 pp.2290-2295, 2013.
[16] Minegishi K, Koiwai Y, Kikuchi Y, Yano K, Kasuga M, Shimizu A. Growth of p-type zinc oxide films by chemical vapor deposition. Japanese Journal of Applied Physics. vol. 36, pp. L1453, Nov 1997.
[17] Sundaram KB, Khan A. Characterization and optimization of zinc oxide films by rf magnetron sputtering. Thin Solid Films. vol. 295, pp.87-91, 28 Feb 1997.
[18] Kamaruddin SA, Chan KY, Yow HK, Zainizan Sahdan M, Saim H, Knipp D. Zinc oxide films prepared by sol–gel spin coating technique. Appl. Phys. A: Mater. Sci. Process. Vol. 104, pp. 263-268,1 July 2011.
[19] Aghamalyan NR, Gambaryan IA, Goulanian EK, Hovsepyan RK, Kostanyan RB, Petrosyan SI, Vardanyan ES, Zerrouk AF. Influence of thermal annealing on optical and electrical properties of ZnO films prepared by electron beam evaporation. Semicond. Sci. Technol. Vol. 18 pp. 525, 28 Apr 2003.
[20] Joseph B, Gopchandran KG, Manoj PK, Koshy P, Vaidyan VK. Optical and electrical properties of zinc oxide films prepared by spray pyrolysis. Bull. Mater. Sci. Vol. 22, pp. 921-926, August 1999.
[21] Liu X, Wu X, Cao H, Chang RP. Growth mechanism and properties of ZnO nanorods synthesized by plasma-enhanced chemical vapor deposition. . J. Appl. Phys. Vol. 95, pp. 3141-3147, 15 Mar 2004.
[22] JEDEC Standard. Integrated Circuits Thermal Test Method Environment Conditions-Natural Convection (Still Air). JESD51-2A. 2007.
How to Cite
AIDA BT JAMALUDIN, Nur Jassriatul; SHANMUGAN, S.; MUTHARASU, D.. Performance of Chemical Vapor Deposited ZnO thin film as thermal interface material on optical properties of LED. International Journal of Research and Engineering, [S.l.], v. 4, n. 4, p. 114-118, apr. 2017. ISSN 2348-7860. Available at: <>. Date accessed: 17 july 2018.